Friction and dynamically dissipated energy dependence on temperature in polycrystalline silicon MEMS devices

Optical-Thermal Phenomena in Polycrystalline Silicon MEMS During Laser Irradiation

Silicon MEMS for Photonic Bandgap Devices

An optical filter is presented based on lateral beam propagation between input and output fibers, through a 1dimensional silicon photonic bandgap (PBG) structure. Optical modelling of the device shows that a very high degree of verticality is needed for the PBG surfaces, and a fabrication technique is described by which these can be obtained, using a combination of wet and dry silicon etching s...

Optical Mems Devices Based on Wet Anisotropic Etching of Silicon

Optical MEMS found various applications over the last years due to the rapidly increasing data rates in optical networks. As standard single-mode fibers are used, the required alignment tolerances are below 1 μm for optical fiber. The assembly and reliability of MOEMS devices requires increasing attention. Additionally, the trend is going from single-functionality devices to more complex subsys...

Dependence of friction on roughness, velocity, and temperature.

We study the dependence of friction on surface roughness, sliding velocity, and temperature. Expanding on the classic treatment of Greenwood and Williamson, we show that the fractal nature of a surface has little influence on the real area of contact and the static friction coefficient. A simple scaling argument shows that the static friction exhibits a weak anomaly mu ~ A(0)(-chi/4), where A0 ...

temperature dependence of phase transformation pressure in silicon

in this experimental work the pressure induced phase transformation of silicon and germaniumhas been studied. it was shown that at a particular value of applied pressure, (pt), depending on the sampletemperature, the electrical resistance of the specimen falls off to a metallic state. the main goal of this studywas to find out how the phase transformation pressure, pt, for a p-type silicon vari...